Beilstein J. Nanotechnol.2021,12, 965–983, doi:10.3762/bjnano.12.73
HIM (Orion Nanofab) is used for nowadays is supported by using up to three different ion species (He, Ne, and Ga). The versatility in its application can be understood when considering ion–solidinteractions which occur when an energetic ion interacts with a specimen. An overview of the different
displacements, replacement collisions, vacancy formation, and a collision cascade as well as backscattered ions, secondary ion emission, and ion implantation. A more detailed description of ion–solidinteractions can be found in [20][21]. The difference between different ion species, energies, and incident
angles lies in the statistics of the ion–solidinteractions and determines the application space for ion species. Higher energy (25–30 keV) He ions predominantly interact via electronic interactions while Ga ions of the same energy predominantly interact via nuclear interactions, making the latter an
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Figure 1:
Illustration of the underlying ion–solid interactions that occur when irradiating a sample with dif...
Beilstein J. Nanotechnol.2018,9, 2708–2717, doi:10.3762/bjnano.9.253
engineering in carbon-based materials.
Keywords: disorder; highly oriented pyrolytic graphite (HOPG); ion–solidinteractions; Raman spectroscopy; topography; Introduction
The development of novel methods to control the properties of carbon-based materials by introducing disorder is currently a subject of
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Figure 1:
Raman spectra of irradiated HOPG (LD-LE, LD-HE, HD-LE and HD-HE). Pristine HOPG is shown for compar...